JPS5039051A - - Google Patents
Info
- Publication number
- JPS5039051A JPS5039051A JP8843473A JP8843473A JPS5039051A JP S5039051 A JPS5039051 A JP S5039051A JP 8843473 A JP8843473 A JP 8843473A JP 8843473 A JP8843473 A JP 8843473A JP S5039051 A JPS5039051 A JP S5039051A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8843473A JPS5039051A (ja) | 1973-08-08 | 1973-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8843473A JPS5039051A (ja) | 1973-08-08 | 1973-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5039051A true JPS5039051A (ja) | 1975-04-10 |
Family
ID=13942676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8843473A Pending JPS5039051A (ja) | 1973-08-08 | 1973-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5039051A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543859A (en) * | 1978-09-25 | 1980-03-27 | Hitachi Ltd | Deposition to semiconductor wafer |
| JPH0244716A (ja) * | 1988-08-05 | 1990-02-14 | Matsushita Electric Ind Co Ltd | 不純物導入方法 |
-
1973
- 1973-08-08 JP JP8843473A patent/JPS5039051A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543859A (en) * | 1978-09-25 | 1980-03-27 | Hitachi Ltd | Deposition to semiconductor wafer |
| JPH0244716A (ja) * | 1988-08-05 | 1990-02-14 | Matsushita Electric Ind Co Ltd | 不純物導入方法 |