JPS5038582A - - Google Patents
Info
- Publication number
- JPS5038582A JPS5038582A JP8834673A JP8834673A JPS5038582A JP S5038582 A JPS5038582 A JP S5038582A JP 8834673 A JP8834673 A JP 8834673A JP 8834673 A JP8834673 A JP 8834673A JP S5038582 A JPS5038582 A JP S5038582A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8834673A JPS5038582A (ja) | 1973-08-08 | 1973-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8834673A JPS5038582A (ja) | 1973-08-08 | 1973-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5038582A true JPS5038582A (ja) | 1975-04-10 |
Family
ID=13940269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8834673A Pending JPS5038582A (ja) | 1973-08-08 | 1973-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5038582A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235430A (ja) * | 2000-02-25 | 2001-08-31 | Nikon Corp | 光学式検査装置および光学式表面検査装置 |
-
1973
- 1973-08-08 JP JP8834673A patent/JPS5038582A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001235430A (ja) * | 2000-02-25 | 2001-08-31 | Nikon Corp | 光学式検査装置および光学式表面検査装置 |