JPS5038470A - - Google Patents
Info
- Publication number
- JPS5038470A JPS5038470A JP48088403A JP8840373A JPS5038470A JP S5038470 A JPS5038470 A JP S5038470A JP 48088403 A JP48088403 A JP 48088403A JP 8840373 A JP8840373 A JP 8840373A JP S5038470 A JPS5038470 A JP S5038470A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48088403A JPS5038470A (ja) | 1973-08-08 | 1973-08-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48088403A JPS5038470A (ja) | 1973-08-08 | 1973-08-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5038470A true JPS5038470A (ja) | 1975-04-09 |
Family
ID=13941818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48088403A Pending JPS5038470A (ja) | 1973-08-08 | 1973-08-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5038470A (ja) |
-
1973
- 1973-08-08 JP JP48088403A patent/JPS5038470A/ja active Pending