JPS5038354B1 - - Google Patents

Info

Publication number
JPS5038354B1
JPS5038354B1 JP8252870A JP8252870A JPS5038354B1 JP S5038354 B1 JPS5038354 B1 JP S5038354B1 JP 8252870 A JP8252870 A JP 8252870A JP 8252870 A JP8252870 A JP 8252870A JP S5038354 B1 JPS5038354 B1 JP S5038354B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8252870A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8252870A priority Critical patent/JPS5038354B1/ja
Publication of JPS5038354B1 publication Critical patent/JPS5038354B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP8252870A 1970-09-22 1970-09-22 Pending JPS5038354B1 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8252870A JPS5038354B1 (zh) 1970-09-22 1970-09-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8252870A JPS5038354B1 (zh) 1970-09-22 1970-09-22

Publications (1)

Publication Number Publication Date
JPS5038354B1 true JPS5038354B1 (zh) 1975-12-09

Family

ID=13777001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8252870A Pending JPS5038354B1 (zh) 1970-09-22 1970-09-22

Country Status (1)

Country Link
JP (1) JPS5038354B1 (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51154535U (zh) * 1975-06-03 1976-12-09
US9176382B2 (en) 2013-03-15 2015-11-03 Shin-Etsu Chemical Co., Ltd. Composition for forming titanium-containing resist underlayer film and patterning process
US9188866B2 (en) 2013-03-15 2015-11-17 Shin-Etsu Chemical Co., Ltd. Composition for forming titanium-containing resist underlayer film and patterning process
US9312144B2 (en) 2013-10-02 2016-04-12 Shin-Etsu Chemical Co., Ltd. Composition for forming a silicon-containing resist under layer film and patterning process

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51154535U (zh) * 1975-06-03 1976-12-09
US9176382B2 (en) 2013-03-15 2015-11-03 Shin-Etsu Chemical Co., Ltd. Composition for forming titanium-containing resist underlayer film and patterning process
US9188866B2 (en) 2013-03-15 2015-11-17 Shin-Etsu Chemical Co., Ltd. Composition for forming titanium-containing resist underlayer film and patterning process
US9312144B2 (en) 2013-10-02 2016-04-12 Shin-Etsu Chemical Co., Ltd. Composition for forming a silicon-containing resist under layer film and patterning process

Similar Documents

Publication Publication Date Title
JPS5038354B1 (zh)
AU1473870A (zh)
AU2044470A (zh)
AU1336970A (zh)
AU1517670A (zh)
AU1716970A (zh)
AU1833270A (zh)
AU2017870A (zh)
AU2085370A (zh)
AU2130570A (zh)
AU442396B2 (zh)
AU1841070A (zh)
AU2112570A (zh)
AU1328670A (zh)
AU1881070A (zh)
AU1343870A (zh)
AU1064870A (zh)
AU1581370A (zh)
AU2144270A (zh)
AU2131570A (zh)
AU2130770A (zh)
AU1591370A (zh)
AU2119370A (zh)
AU2115870A (zh)
AU1603270A (zh)