JPS5038354B1 - - Google Patents
Info
- Publication number
- JPS5038354B1 JPS5038354B1 JP8252870A JP8252870A JPS5038354B1 JP S5038354 B1 JPS5038354 B1 JP S5038354B1 JP 8252870 A JP8252870 A JP 8252870A JP 8252870 A JP8252870 A JP 8252870A JP S5038354 B1 JPS5038354 B1 JP S5038354B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8252870A JPS5038354B1 (zh) | 1970-09-22 | 1970-09-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8252870A JPS5038354B1 (zh) | 1970-09-22 | 1970-09-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5038354B1 true JPS5038354B1 (zh) | 1975-12-09 |
Family
ID=13777001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8252870A Pending JPS5038354B1 (zh) | 1970-09-22 | 1970-09-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5038354B1 (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51154535U (zh) * | 1975-06-03 | 1976-12-09 | ||
US9176382B2 (en) | 2013-03-15 | 2015-11-03 | Shin-Etsu Chemical Co., Ltd. | Composition for forming titanium-containing resist underlayer film and patterning process |
US9188866B2 (en) | 2013-03-15 | 2015-11-17 | Shin-Etsu Chemical Co., Ltd. | Composition for forming titanium-containing resist underlayer film and patterning process |
US9312144B2 (en) | 2013-10-02 | 2016-04-12 | Shin-Etsu Chemical Co., Ltd. | Composition for forming a silicon-containing resist under layer film and patterning process |
-
1970
- 1970-09-22 JP JP8252870A patent/JPS5038354B1/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51154535U (zh) * | 1975-06-03 | 1976-12-09 | ||
US9176382B2 (en) | 2013-03-15 | 2015-11-03 | Shin-Etsu Chemical Co., Ltd. | Composition for forming titanium-containing resist underlayer film and patterning process |
US9188866B2 (en) | 2013-03-15 | 2015-11-17 | Shin-Etsu Chemical Co., Ltd. | Composition for forming titanium-containing resist underlayer film and patterning process |
US9312144B2 (en) | 2013-10-02 | 2016-04-12 | Shin-Etsu Chemical Co., Ltd. | Composition for forming a silicon-containing resist under layer film and patterning process |