JPS503782A - - Google Patents

Info

Publication number
JPS503782A
JPS503782A JP5379373A JP5379373A JPS503782A JP S503782 A JPS503782 A JP S503782A JP 5379373 A JP5379373 A JP 5379373A JP 5379373 A JP5379373 A JP 5379373A JP S503782 A JPS503782 A JP S503782A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5379373A
Other versions
JPS5951131B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48053793A priority Critical patent/JPS5951131B2/ja
Publication of JPS503782A publication Critical patent/JPS503782A/ja
Publication of JPS5951131B2 publication Critical patent/JPS5951131B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP48053793A 1973-05-15 1973-05-15 酸化膜形成方法 Expired JPS5951131B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48053793A JPS5951131B2 (ja) 1973-05-15 1973-05-15 酸化膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48053793A JPS5951131B2 (ja) 1973-05-15 1973-05-15 酸化膜形成方法

Publications (2)

Publication Number Publication Date
JPS503782A true JPS503782A (ja) 1975-01-16
JPS5951131B2 JPS5951131B2 (ja) 1984-12-12

Family

ID=12952684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48053793A Expired JPS5951131B2 (ja) 1973-05-15 1973-05-15 酸化膜形成方法

Country Status (1)

Country Link
JP (1) JPS5951131B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196129A (ja) * 1988-02-01 1989-08-07 Toshiba Ceramics Co Ltd 半導体ウェーハに対する熱酸化膜の形成方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1967 *
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1972 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01196129A (ja) * 1988-02-01 1989-08-07 Toshiba Ceramics Co Ltd 半導体ウェーハに対する熱酸化膜の形成方法

Also Published As

Publication number Publication date
JPS5951131B2 (ja) 1984-12-12

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