JPS503782A - - Google Patents
Info
- Publication number
- JPS503782A JPS503782A JP5379373A JP5379373A JPS503782A JP S503782 A JPS503782 A JP S503782A JP 5379373 A JP5379373 A JP 5379373A JP 5379373 A JP5379373 A JP 5379373A JP S503782 A JPS503782 A JP S503782A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48053793A JPS5951131B2 (ja) | 1973-05-15 | 1973-05-15 | 酸化膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48053793A JPS5951131B2 (ja) | 1973-05-15 | 1973-05-15 | 酸化膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS503782A true JPS503782A (ja) | 1975-01-16 |
| JPS5951131B2 JPS5951131B2 (ja) | 1984-12-12 |
Family
ID=12952684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48053793A Expired JPS5951131B2 (ja) | 1973-05-15 | 1973-05-15 | 酸化膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5951131B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01196129A (ja) * | 1988-02-01 | 1989-08-07 | Toshiba Ceramics Co Ltd | 半導体ウェーハに対する熱酸化膜の形成方法 |
-
1973
- 1973-05-15 JP JP48053793A patent/JPS5951131B2/ja not_active Expired
Non-Patent Citations (2)
| Title |
|---|
| JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1967 * |
| JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1972 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01196129A (ja) * | 1988-02-01 | 1989-08-07 | Toshiba Ceramics Co Ltd | 半導体ウェーハに対する熱酸化膜の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5951131B2 (ja) | 1984-12-12 |