JPS5037674A - - Google Patents

Info

Publication number
JPS5037674A
JPS5037674A JP48088596A JP8859673A JPS5037674A JP S5037674 A JPS5037674 A JP S5037674A JP 48088596 A JP48088596 A JP 48088596A JP 8859673 A JP8859673 A JP 8859673A JP S5037674 A JPS5037674 A JP S5037674A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48088596A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48088596A priority Critical patent/JPS5037674A/ja
Publication of JPS5037674A publication Critical patent/JPS5037674A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Catalysts (AREA)
JP48088596A 1973-08-07 1973-08-07 Pending JPS5037674A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48088596A JPS5037674A (enrdf_load_stackoverflow) 1973-08-07 1973-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48088596A JPS5037674A (enrdf_load_stackoverflow) 1973-08-07 1973-08-07

Publications (1)

Publication Number Publication Date
JPS5037674A true JPS5037674A (enrdf_load_stackoverflow) 1975-04-08

Family

ID=13947198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48088596A Pending JPS5037674A (enrdf_load_stackoverflow) 1973-08-07 1973-08-07

Country Status (1)

Country Link
JP (1) JPS5037674A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124889A (enrdf_load_stackoverflow) * 1974-03-06 1975-10-01
JPS5312768A (en) * 1976-07-23 1978-02-04 Takeda Chem Ind Ltd Removing method for organic compounds or carbon monoxide in exhaust gas
JPS5730524A (en) * 1980-07-30 1982-02-18 Tsuchiya Mfg Co Ltd Treatment of fine particles in exhaust gas
US6471925B1 (en) * 2000-01-21 2002-10-29 Agere Systems Guardian Corp. Method for treating an effluent gas during semiconductor processing

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50124889A (enrdf_load_stackoverflow) * 1974-03-06 1975-10-01
JPS5312768A (en) * 1976-07-23 1978-02-04 Takeda Chem Ind Ltd Removing method for organic compounds or carbon monoxide in exhaust gas
JPS5730524A (en) * 1980-07-30 1982-02-18 Tsuchiya Mfg Co Ltd Treatment of fine particles in exhaust gas
US6471925B1 (en) * 2000-01-21 2002-10-29 Agere Systems Guardian Corp. Method for treating an effluent gas during semiconductor processing

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