JPS5037372A - - Google Patents
Info
- Publication number
- JPS5037372A JPS5037372A JP8754673A JP8754673A JPS5037372A JP S5037372 A JPS5037372 A JP S5037372A JP 8754673 A JP8754673 A JP 8754673A JP 8754673 A JP8754673 A JP 8754673A JP S5037372 A JPS5037372 A JP S5037372A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8754673A JPS5248059B2 (ja) | 1973-08-06 | 1973-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8754673A JPS5248059B2 (ja) | 1973-08-06 | 1973-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5037372A true JPS5037372A (ja) | 1975-04-08 |
| JPS5248059B2 JPS5248059B2 (ja) | 1977-12-07 |
Family
ID=13917969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8754673A Expired JPS5248059B2 (ja) | 1973-08-06 | 1973-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5248059B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6136767A (en) * | 1997-03-03 | 2000-10-24 | Micron Technology, Inc. | Dilute composition cleaning method |
| US6313048B1 (en) | 1997-03-03 | 2001-11-06 | Micron Technology, Inc. | Dilute cleaning composition and method for using same |
| US6486108B1 (en) | 2000-05-31 | 2002-11-26 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
-
1973
- 1973-08-06 JP JP8754673A patent/JPS5248059B2/ja not_active Expired
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6136767A (en) * | 1997-03-03 | 2000-10-24 | Micron Technology, Inc. | Dilute composition cleaning method |
| US6313048B1 (en) | 1997-03-03 | 2001-11-06 | Micron Technology, Inc. | Dilute cleaning composition and method for using same |
| US6384001B2 (en) | 1997-03-03 | 2002-05-07 | Micron Technology, Inc. | Dilute cleaning composition |
| US6596647B2 (en) | 1997-03-03 | 2003-07-22 | Micron Technology, Inc. | Dilute cleaning composition and method for using the same |
| US6841525B2 (en) | 1997-03-03 | 2005-01-11 | Micron Technology, Inc. | Dilute cleaning composition and method for using same |
| US6486108B1 (en) | 2000-05-31 | 2002-11-26 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
| US6831047B2 (en) | 2000-05-31 | 2004-12-14 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
| US7067465B2 (en) | 2000-05-31 | 2006-06-27 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabricating |
| US7067466B2 (en) | 2000-05-31 | 2006-06-27 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
| US7087561B2 (en) | 2000-05-31 | 2006-08-08 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
| US7135444B2 (en) | 2000-05-31 | 2006-11-14 | Micron Technology, Inc. | Cleaning composition useful in semiconductor integrated circuit fabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5248059B2 (ja) | 1977-12-07 |