JPS5036382A - - Google Patents

Info

Publication number
JPS5036382A
JPS5036382A JP8824873A JP8824873A JPS5036382A JP S5036382 A JPS5036382 A JP S5036382A JP 8824873 A JP8824873 A JP 8824873A JP 8824873 A JP8824873 A JP 8824873A JP S5036382 A JPS5036382 A JP S5036382A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8824873A
Other versions
JPS5318185B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8824873A priority Critical patent/JPS5318185B2/ja
Publication of JPS5036382A publication Critical patent/JPS5036382A/ja
Publication of JPS5318185B2 publication Critical patent/JPS5318185B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8824873A 1973-08-04 1973-08-04 Expired JPS5318185B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8824873A JPS5318185B2 (ja) 1973-08-04 1973-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8824873A JPS5318185B2 (ja) 1973-08-04 1973-08-04

Publications (2)

Publication Number Publication Date
JPS5036382A true JPS5036382A (ja) 1975-04-05
JPS5318185B2 JPS5318185B2 (ja) 1978-06-13

Family

ID=13937539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8824873A Expired JPS5318185B2 (ja) 1973-08-04 1973-08-04

Country Status (1)

Country Link
JP (1) JPS5318185B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149876A (en) * 1977-06-03 1978-12-27 Ulvac Corp Depositing apparatus by vacuum evaporation
JPH04137500U (ja) * 1991-06-12 1992-12-22 日本電気アイシーマイコンシステム株式会社 ステツプモータ駆動回路

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583361A (en) * 1969-12-18 1971-06-08 Atomic Energy Commission Ion beam deposition system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3583361A (en) * 1969-12-18 1971-06-08 Atomic Energy Commission Ion beam deposition system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149876A (en) * 1977-06-03 1978-12-27 Ulvac Corp Depositing apparatus by vacuum evaporation
JPH04137500U (ja) * 1991-06-12 1992-12-22 日本電気アイシーマイコンシステム株式会社 ステツプモータ駆動回路

Also Published As

Publication number Publication date
JPS5318185B2 (ja) 1978-06-13

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