JPS5036382A - - Google Patents
Info
- Publication number
- JPS5036382A JPS5036382A JP8824873A JP8824873A JPS5036382A JP S5036382 A JPS5036382 A JP S5036382A JP 8824873 A JP8824873 A JP 8824873A JP 8824873 A JP8824873 A JP 8824873A JP S5036382 A JPS5036382 A JP S5036382A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8824873A JPS5318185B2 (ja) | 1973-08-04 | 1973-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8824873A JPS5318185B2 (ja) | 1973-08-04 | 1973-08-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5036382A true JPS5036382A (ja) | 1975-04-05 |
| JPS5318185B2 JPS5318185B2 (ja) | 1978-06-13 |
Family
ID=13937539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8824873A Expired JPS5318185B2 (ja) | 1973-08-04 | 1973-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5318185B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149876A (en) * | 1977-06-03 | 1978-12-27 | Ulvac Corp | Depositing apparatus by vacuum evaporation |
| JPH04137500U (ja) * | 1991-06-12 | 1992-12-22 | 日本電気アイシーマイコンシステム株式会社 | ステツプモータ駆動回路 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3583361A (en) * | 1969-12-18 | 1971-06-08 | Atomic Energy Commission | Ion beam deposition system |
-
1973
- 1973-08-04 JP JP8824873A patent/JPS5318185B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3583361A (en) * | 1969-12-18 | 1971-06-08 | Atomic Energy Commission | Ion beam deposition system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53149876A (en) * | 1977-06-03 | 1978-12-27 | Ulvac Corp | Depositing apparatus by vacuum evaporation |
| JPH04137500U (ja) * | 1991-06-12 | 1992-12-22 | 日本電気アイシーマイコンシステム株式会社 | ステツプモータ駆動回路 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5318185B2 (ja) | 1978-06-13 |