JPS5036323A - - Google Patents

Info

Publication number
JPS5036323A
JPS5036323A JP7034774A JP7034774A JPS5036323A JP S5036323 A JPS5036323 A JP S5036323A JP 7034774 A JP7034774 A JP 7034774A JP 7034774 A JP7034774 A JP 7034774A JP S5036323 A JPS5036323 A JP S5036323A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7034774A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5036323A publication Critical patent/JPS5036323A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
JP7034774A 1973-06-21 1974-06-21 Pending JPS5036323A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU67842A LU67842A1 (ja) 1973-06-21 1973-06-21

Publications (1)

Publication Number Publication Date
JPS5036323A true JPS5036323A (ja) 1975-04-05

Family

ID=19727374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7034774A Pending JPS5036323A (ja) 1973-06-21 1974-06-21

Country Status (9)

Country Link
JP (1) JPS5036323A (ja)
BE (1) BE815386A (ja)
DD (1) DD111699A5 (ja)
DE (1) DE2427308A1 (ja)
FR (1) FR2234381B3 (ja)
GB (1) GB1478996A (ja)
IT (1) IT1013425B (ja)
LU (1) LU67842A1 (ja)
NL (1) NL7408059A (ja)

Also Published As

Publication number Publication date
LU67842A1 (ja) 1974-07-10
IT1013425B (it) 1977-03-30
DD111699A5 (ja) 1975-03-05
DE2427308A1 (de) 1975-02-27
GB1478996A (en) 1977-07-06
BE815386A (fr) 1974-09-16
FR2234381B3 (ja) 1977-04-08
NL7408059A (ja) 1974-12-24
FR2234381A1 (ja) 1975-01-17

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