JPS503616A - - Google Patents

Info

Publication number
JPS503616A
JPS503616A JP3707074A JP3707074A JPS503616A JP S503616 A JPS503616 A JP S503616A JP 3707074 A JP3707074 A JP 3707074A JP 3707074 A JP3707074 A JP 3707074A JP S503616 A JPS503616 A JP S503616A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3707074A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS503616A publication Critical patent/JPS503616A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/72—Repair or correction of mask defects

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP3707074A 1973-05-03 1974-04-03 Pending JPS503616A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00356862A US3823016A (en) 1973-05-03 1973-05-03 Photomask repair process

Publications (1)

Publication Number Publication Date
JPS503616A true JPS503616A (ja) 1975-01-16

Family

ID=23403275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3707074A Pending JPS503616A (ja) 1973-05-03 1974-04-03

Country Status (5)

Country Link
US (1) US3823016A (ja)
JP (1) JPS503616A (ja)
DE (1) DE2419947A1 (ja)
FR (1) FR2228239B1 (ja)
GB (1) GB1419477A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60131947U (ja) * 1983-10-31 1985-09-03 株式会社東芝 防爆形ブラウン管

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3950170A (en) * 1969-12-02 1976-04-13 Licentia Patent-Verwaltungs-G.M.B.H. Method of photographic transfer using partial exposures to negate mask defects
DE4107762B4 (de) * 1990-03-09 2006-07-13 Dai Nippon Printing Co., Ltd. Verfahren zum Herstellen von Master- und Arbeitsmusterplatten für den Ätzprozess
US5801833A (en) * 1991-03-08 1998-09-01 Dai Nippon Printing Co., Ltd. Method of producing master and working pattern plates for etching and photolithographic apparatus therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60131947U (ja) * 1983-10-31 1985-09-03 株式会社東芝 防爆形ブラウン管

Also Published As

Publication number Publication date
DE2419947A1 (de) 1974-11-21
FR2228239B1 (ja) 1976-06-25
US3823016A (en) 1974-07-09
FR2228239A1 (ja) 1974-11-29
GB1419477A (en) 1975-12-31

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