JPS5036148A - - Google Patents

Info

Publication number
JPS5036148A
JPS5036148A JP6644174A JP6644174A JPS5036148A JP S5036148 A JPS5036148 A JP S5036148A JP 6644174 A JP6644174 A JP 6644174A JP 6644174 A JP6644174 A JP 6644174A JP S5036148 A JPS5036148 A JP S5036148A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6644174A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5036148A publication Critical patent/JPS5036148A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP6644174A 1973-06-13 1974-06-10 Pending JPS5036148A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH854673A CH585675A5 (ja) 1973-06-13 1973-06-13

Publications (1)

Publication Number Publication Date
JPS5036148A true JPS5036148A (ja) 1975-04-05

Family

ID=4341797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6644174A Pending JPS5036148A (ja) 1973-06-13 1974-06-10

Country Status (4)

Country Link
JP (1) JPS5036148A (ja)
CH (1) CH585675A5 (ja)
DE (1) DE2337204A1 (ja)
IT (1) IT1015018B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH599982A5 (ja) * 1975-09-02 1978-06-15 Balzers Patent Beteilig Ag
CH659485A5 (de) * 1984-05-30 1987-01-30 Balzers Hochvakuum Mehrfach-haltevorrichtung fuer zu behandelnde substrate.
CH668430A5 (de) * 1986-07-31 1988-12-30 Satis Vacuum Ag Vakuum-beschichtungsanlage fuer optische substrate.
CH679838A5 (en) * 1990-05-11 1992-04-30 Balzers Hochvakuum Glass lens mounting ring - supporting lens at edges for coating
CH681308A5 (ja) * 1990-05-22 1993-02-26 Satis Vacuum Ag
DE102016120493A1 (de) * 2016-10-27 2018-05-03 Von Ardenne Gmbh Substratwendevorrichtung und Substratwendeverfahren

Also Published As

Publication number Publication date
CH585675A5 (ja) 1977-03-15
IT1015018B (it) 1977-05-10
DE2337204A1 (de) 1975-01-09

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