JPS50348A - - Google Patents
Info
- Publication number
- JPS50348A JPS50348A JP4914073A JP4914073A JPS50348A JP S50348 A JPS50348 A JP S50348A JP 4914073 A JP4914073 A JP 4914073A JP 4914073 A JP4914073 A JP 4914073A JP S50348 A JPS50348 A JP S50348A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Contacts (AREA)
- Manufacture Of Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4914073A JPS5430094B2 (ja) | 1973-05-04 | 1973-05-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4914073A JPS5430094B2 (ja) | 1973-05-04 | 1973-05-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50348A true JPS50348A (ja) | 1975-01-06 |
| JPS5430094B2 JPS5430094B2 (ja) | 1979-09-28 |
Family
ID=12822761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4914073A Expired JPS5430094B2 (ja) | 1973-05-04 | 1973-05-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5430094B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950092A (ja) * | 1982-09-10 | 1984-03-22 | Toshiba Mach Co Ltd | 筒型気相成長装置 |
| JPS62288192A (ja) * | 1986-06-04 | 1987-12-15 | Anelva Corp | 単結晶薄膜形成装置 |
-
1973
- 1973-05-04 JP JP4914073A patent/JPS5430094B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950092A (ja) * | 1982-09-10 | 1984-03-22 | Toshiba Mach Co Ltd | 筒型気相成長装置 |
| JPS62288192A (ja) * | 1986-06-04 | 1987-12-15 | Anelva Corp | 単結晶薄膜形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5430094B2 (ja) | 1979-09-28 |