JPS5033866B2 - - Google Patents
Info
- Publication number
- JPS5033866B2 JPS5033866B2 JP47062714A JP6271472A JPS5033866B2 JP S5033866 B2 JPS5033866 B2 JP S5033866B2 JP 47062714 A JP47062714 A JP 47062714A JP 6271472 A JP6271472 A JP 6271472A JP S5033866 B2 JPS5033866 B2 JP S5033866B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Fax Reproducing Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47062714A JPS5033866B2 (en:Method) | 1972-06-21 | 1972-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47062714A JPS5033866B2 (en:Method) | 1972-06-21 | 1972-06-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4925938A JPS4925938A (en:Method) | 1974-03-07 |
| JPS5033866B2 true JPS5033866B2 (en:Method) | 1975-11-04 |
Family
ID=13208262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47062714A Expired JPS5033866B2 (en:Method) | 1972-06-21 | 1972-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5033866B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11275316B2 (en) | 2005-12-30 | 2022-03-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5412822B2 (en:Method) * | 1971-12-28 | 1979-05-25 |
-
1972
- 1972-06-21 JP JP47062714A patent/JPS5033866B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11275316B2 (en) | 2005-12-30 | 2022-03-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4925938A (en:Method) | 1974-03-07 |