JPS5033184A - - Google Patents
Info
- Publication number
- JPS5033184A JPS5033184A JP8403173A JP8403173A JPS5033184A JP S5033184 A JPS5033184 A JP S5033184A JP 8403173 A JP8403173 A JP 8403173A JP 8403173 A JP8403173 A JP 8403173A JP S5033184 A JPS5033184 A JP S5033184A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8403173A JPS5033184A (ja) | 1973-07-27 | 1973-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8403173A JPS5033184A (ja) | 1973-07-27 | 1973-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5033184A true JPS5033184A (ja) | 1975-03-31 |
Family
ID=13819155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8403173A Pending JPS5033184A (ja) | 1973-07-27 | 1973-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5033184A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190133609A (ko) | 2018-05-23 | 2019-12-03 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 화학 기상 성장 장치 및 피막 형성 방법 |
-
1973
- 1973-07-27 JP JP8403173A patent/JPS5033184A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190133609A (ko) | 2018-05-23 | 2019-12-03 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 화학 기상 성장 장치 및 피막 형성 방법 |
| US11885022B2 (en) | 2018-05-23 | 2024-01-30 | Shin-Etsu Chemical Co., Ltd. | Method of forming a film on a substrate by chemical vapor deposition |