JPS5032444B1 - - Google Patents

Info

Publication number
JPS5032444B1
JPS5032444B1 JP9025369A JP9025369A JPS5032444B1 JP S5032444 B1 JPS5032444 B1 JP S5032444B1 JP 9025369 A JP9025369 A JP 9025369A JP 9025369 A JP9025369 A JP 9025369A JP S5032444 B1 JPS5032444 B1 JP S5032444B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9025369A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9025369A priority Critical patent/JPS5032444B1/ja
Publication of JPS5032444B1 publication Critical patent/JPS5032444B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details And Applications Of Rotary Liquid Pumps (AREA)
JP9025369A 1969-11-12 1969-11-12 Pending JPS5032444B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9025369A JPS5032444B1 (ko) 1969-11-12 1969-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9025369A JPS5032444B1 (ko) 1969-11-12 1969-11-12

Publications (1)

Publication Number Publication Date
JPS5032444B1 true JPS5032444B1 (ko) 1975-10-21

Family

ID=13993317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9025369A Pending JPS5032444B1 (ko) 1969-11-12 1969-11-12

Country Status (1)

Country Link
JP (1) JPS5032444B1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170101782A (ko) 2016-02-29 2017-09-06 엔지케이 인슐레이터 엘티디 세라믹 구조체, 그 제법 및 반도체 제조 장치용 부재

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2928350A (en) * 1957-08-02 1960-03-15 Prendergast Charles Scott Vane displacement pumps or motors

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2928350A (en) * 1957-08-02 1960-03-15 Prendergast Charles Scott Vane displacement pumps or motors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170101782A (ko) 2016-02-29 2017-09-06 엔지케이 인슐레이터 엘티디 세라믹 구조체, 그 제법 및 반도체 제조 장치용 부재

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