JPS5032021A - - Google Patents

Info

Publication number
JPS5032021A
JPS5032021A JP8338073A JP8338073A JPS5032021A JP S5032021 A JPS5032021 A JP S5032021A JP 8338073 A JP8338073 A JP 8338073A JP 8338073 A JP8338073 A JP 8338073A JP S5032021 A JPS5032021 A JP S5032021A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8338073A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8338073A priority Critical patent/JPS5032021A/ja
Publication of JPS5032021A publication Critical patent/JPS5032021A/ja
Pending legal-status Critical Current

Links

JP8338073A 1973-07-24 1973-07-24 Pending JPS5032021A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8338073A JPS5032021A (ja) 1973-07-24 1973-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8338073A JPS5032021A (ja) 1973-07-24 1973-07-24

Publications (1)

Publication Number Publication Date
JPS5032021A true JPS5032021A (ja) 1975-03-28

Family

ID=13800801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8338073A Pending JPS5032021A (ja) 1973-07-24 1973-07-24

Country Status (1)

Country Link
JP (1) JPS5032021A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58166768A (ja) * 1982-03-29 1983-10-01 Oki Electric Ind Co Ltd 半導体素子ゲ−ト金属膜のコ−テイング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58166768A (ja) * 1982-03-29 1983-10-01 Oki Electric Ind Co Ltd 半導体素子ゲ−ト金属膜のコ−テイング方法

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