JPS5030754A - - Google Patents
Info
- Publication number
- JPS5030754A JPS5030754A JP8067873A JP8067873A JPS5030754A JP S5030754 A JPS5030754 A JP S5030754A JP 8067873 A JP8067873 A JP 8067873A JP 8067873 A JP8067873 A JP 8067873A JP S5030754 A JPS5030754 A JP S5030754A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8067873A JPS5548110B2 (ja) | 1973-07-20 | 1973-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8067873A JPS5548110B2 (ja) | 1973-07-20 | 1973-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5030754A true JPS5030754A (ja) | 1975-03-27 |
| JPS5548110B2 JPS5548110B2 (ja) | 1980-12-04 |
Family
ID=13724996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8067873A Expired JPS5548110B2 (ja) | 1973-07-20 | 1973-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5548110B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5800726A (en) * | 1995-07-26 | 1998-09-01 | International Business Machines Corporation | Selective chemical etching in microelectronics fabrication |
-
1973
- 1973-07-20 JP JP8067873A patent/JPS5548110B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5800726A (en) * | 1995-07-26 | 1998-09-01 | International Business Machines Corporation | Selective chemical etching in microelectronics fabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5548110B2 (ja) | 1980-12-04 |