JPS5029655B1 - - Google Patents
Info
- Publication number
- JPS5029655B1 JPS5029655B1 JP8906470A JP8906470A JPS5029655B1 JP S5029655 B1 JPS5029655 B1 JP S5029655B1 JP 8906470 A JP8906470 A JP 8906470A JP 8906470 A JP8906470 A JP 8906470A JP S5029655 B1 JPS5029655 B1 JP S5029655B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8906470A JPS5029655B1 (ja) | 1970-10-09 | 1970-10-09 | |
| DE19712150110 DE2150110C3 (de) | 1970-10-09 | 1971-10-07 | Verfahren zur Messung von Fehlern in einem beugungsgitterartigen Objekt mit periodischer Struktur |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8906470A JPS5029655B1 (ja) | 1970-10-09 | 1970-10-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5029655B1 true JPS5029655B1 (ja) | 1975-09-25 |
Family
ID=13960408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8906470A Pending JPS5029655B1 (ja) | 1970-10-09 | 1970-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5029655B1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016121711B4 (de) * | 2015-11-20 | 2021-06-17 | Fanuc Corporation | Werkzeugmaschine |
-
1970
- 1970-10-09 JP JP8906470A patent/JPS5029655B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016121711B4 (de) * | 2015-11-20 | 2021-06-17 | Fanuc Corporation | Werkzeugmaschine |