JPS5028485A - - Google Patents
Info
- Publication number
- JPS5028485A JPS5028485A JP8043473A JP8043473A JPS5028485A JP S5028485 A JPS5028485 A JP S5028485A JP 8043473 A JP8043473 A JP 8043473A JP 8043473 A JP8043473 A JP 8043473A JP S5028485 A JPS5028485 A JP S5028485A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8043473A JPS5343905B2 (ja) | 1973-07-19 | 1973-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8043473A JPS5343905B2 (ja) | 1973-07-19 | 1973-07-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5028485A true JPS5028485A (ja) | 1975-03-24 |
| JPS5343905B2 JPS5343905B2 (ja) | 1978-11-24 |
Family
ID=13718148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8043473A Expired JPS5343905B2 (ja) | 1973-07-19 | 1973-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5343905B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000144404A (ja) * | 1998-10-30 | 2000-05-26 | Applied Materials Inc | スパッタリング装置及び成膜方法 |
-
1973
- 1973-07-19 JP JP8043473A patent/JPS5343905B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000144404A (ja) * | 1998-10-30 | 2000-05-26 | Applied Materials Inc | スパッタリング装置及び成膜方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5343905B2 (ja) | 1978-11-24 |