JPS5027560B1 - - Google Patents

Info

Publication number
JPS5027560B1
JPS5027560B1 JP10553670A JP10553670A JPS5027560B1 JP S5027560 B1 JPS5027560 B1 JP S5027560B1 JP 10553670 A JP10553670 A JP 10553670A JP 10553670 A JP10553670 A JP 10553670A JP S5027560 B1 JPS5027560 B1 JP S5027560B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10553670A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5027560B1 publication Critical patent/JPS5027560B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/18Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/90Leading-in arrangements; Seals therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H5/00Direct voltage accelerators; Accelerators using single pulses
    • H05H5/02Details

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Manipulator (AREA)
JP10553670A 1969-11-28 1970-11-26 Pending JPS5027560B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1781969A CH516879A (de) 1969-11-28 1969-11-28 Mit einer Einrichtung zum Austauschen von Bauelementen und Betriebsmedien ausgerüstete gekapselte Anlage, insbesondere Hochspannungsanlage

Publications (1)

Publication Number Publication Date
JPS5027560B1 true JPS5027560B1 (ja) 1975-09-08

Family

ID=4428336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10553670A Pending JPS5027560B1 (ja) 1969-11-28 1970-11-26

Country Status (5)

Country Link
JP (1) JPS5027560B1 (ja)
CH (1) CH516879A (ja)
DE (1) DE2058327A1 (ja)
FR (1) FR2072559A5 (ja)
GB (1) GB1323600A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5883385U (ja) * 1981-12-02 1983-06-06 鹿島建設株式会社 天井クレ−ンの非常停止装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115875223A (zh) * 2022-11-08 2023-03-31 上海空间推进研究所 电推进系统空心阴极密封结构及空心阴极气密性检验方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5883385U (ja) * 1981-12-02 1983-06-06 鹿島建設株式会社 天井クレ−ンの非常停止装置

Also Published As

Publication number Publication date
FR2072559A5 (ja) 1971-09-24
GB1323600A (en) 1973-07-18
DE2058327A1 (de) 1971-06-03
CH516879A (de) 1971-12-15

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