JPS5027204B1 - - Google Patents

Info

Publication number
JPS5027204B1
JPS5027204B1 JP3313369A JP3313369A JPS5027204B1 JP S5027204 B1 JPS5027204 B1 JP S5027204B1 JP 3313369 A JP3313369 A JP 3313369A JP 3313369 A JP3313369 A JP 3313369A JP S5027204 B1 JPS5027204 B1 JP S5027204B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3313369A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3313369A priority Critical patent/JPS5027204B1/ja
Publication of JPS5027204B1 publication Critical patent/JPS5027204B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP3313369A 1969-04-28 1969-04-28 Pending JPS5027204B1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3313369A JPS5027204B1 (ja) 1969-04-28 1969-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3313369A JPS5027204B1 (ja) 1969-04-28 1969-04-28

Publications (1)

Publication Number Publication Date
JPS5027204B1 true JPS5027204B1 (ja) 1975-09-05

Family

ID=12378087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3313369A Pending JPS5027204B1 (ja) 1969-04-28 1969-04-28

Country Status (1)

Country Link
JP (1) JPS5027204B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020122429A (ja) * 2019-01-30 2020-08-13 株式会社島津製作所 ターボ分子ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020122429A (ja) * 2019-01-30 2020-08-13 株式会社島津製作所 ターボ分子ポンプ

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