JPS5027195A - - Google Patents
Info
- Publication number
- JPS5027195A JPS5027195A JP48078359A JP7835973A JPS5027195A JP S5027195 A JPS5027195 A JP S5027195A JP 48078359 A JP48078359 A JP 48078359A JP 7835973 A JP7835973 A JP 7835973A JP S5027195 A JPS5027195 A JP S5027195A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48078359A JPS5027195A (cs) | 1973-07-13 | 1973-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48078359A JPS5027195A (cs) | 1973-07-13 | 1973-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5027195A true JPS5027195A (cs) | 1975-03-20 |
Family
ID=13659783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48078359A Pending JPS5027195A (cs) | 1973-07-13 | 1973-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5027195A (cs) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948577U (ja) * | 1982-09-22 | 1984-03-31 | 富士通株式会社 | 表示パネル |
| US4512113A (en) * | 1982-09-23 | 1985-04-23 | Budinger William D | Workpiece holder for polishing operation |
| JPS6176270A (ja) * | 1984-09-25 | 1986-04-18 | Disco Abrasive Sys Ltd | 研磨装置 |
| US7883397B2 (en) | 1998-05-15 | 2011-02-08 | Applied Materials, Inc. | Substrate retainer |
-
1973
- 1973-07-13 JP JP48078359A patent/JPS5027195A/ja active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5948577U (ja) * | 1982-09-22 | 1984-03-31 | 富士通株式会社 | 表示パネル |
| US4512113A (en) * | 1982-09-23 | 1985-04-23 | Budinger William D | Workpiece holder for polishing operation |
| JPS6176270A (ja) * | 1984-09-25 | 1986-04-18 | Disco Abrasive Sys Ltd | 研磨装置 |
| US7883397B2 (en) | 1998-05-15 | 2011-02-08 | Applied Materials, Inc. | Substrate retainer |
| US8298047B2 (en) | 1998-05-15 | 2012-10-30 | Applied Materials, Inc. | Substrate retainer |
| US8628378B2 (en) | 1998-05-15 | 2014-01-14 | Applied Materials, Inc. | Method for holding and polishing a substrate |