JPS5027195A - - Google Patents

Info

Publication number
JPS5027195A
JPS5027195A JP48078359A JP7835973A JPS5027195A JP S5027195 A JPS5027195 A JP S5027195A JP 48078359 A JP48078359 A JP 48078359A JP 7835973 A JP7835973 A JP 7835973A JP S5027195 A JPS5027195 A JP S5027195A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48078359A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48078359A priority Critical patent/JPS5027195A/ja
Publication of JPS5027195A publication Critical patent/JPS5027195A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP48078359A 1973-07-13 1973-07-13 Pending JPS5027195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48078359A JPS5027195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-13 1973-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48078359A JPS5027195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-13 1973-07-13

Publications (1)

Publication Number Publication Date
JPS5027195A true JPS5027195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-20

Family

ID=13659783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48078359A Pending JPS5027195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-07-13 1973-07-13

Country Status (1)

Country Link
JP (1) JPS5027195A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948577U (ja) * 1982-09-22 1984-03-31 富士通株式会社 表示パネル
US4512113A (en) * 1982-09-23 1985-04-23 Budinger William D Workpiece holder for polishing operation
JPS6176270A (ja) * 1984-09-25 1986-04-18 Disco Abrasive Sys Ltd 研磨装置
US7883397B2 (en) 1998-05-15 2011-02-08 Applied Materials, Inc. Substrate retainer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948577U (ja) * 1982-09-22 1984-03-31 富士通株式会社 表示パネル
US4512113A (en) * 1982-09-23 1985-04-23 Budinger William D Workpiece holder for polishing operation
JPS6176270A (ja) * 1984-09-25 1986-04-18 Disco Abrasive Sys Ltd 研磨装置
US7883397B2 (en) 1998-05-15 2011-02-08 Applied Materials, Inc. Substrate retainer
US8298047B2 (en) 1998-05-15 2012-10-30 Applied Materials, Inc. Substrate retainer
US8628378B2 (en) 1998-05-15 2014-01-14 Applied Materials, Inc. Method for holding and polishing a substrate

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