JPS5027114B2 - - Google Patents

Info

Publication number
JPS5027114B2
JPS5027114B2 JP47035426A JP3542672A JPS5027114B2 JP S5027114 B2 JPS5027114 B2 JP S5027114B2 JP 47035426 A JP47035426 A JP 47035426A JP 3542672 A JP3542672 A JP 3542672A JP S5027114 B2 JPS5027114 B2 JP S5027114B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47035426A
Other languages
Japanese (ja)
Other versions
JPS48103888A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47035426A priority Critical patent/JPS5027114B2/ja
Publication of JPS48103888A publication Critical patent/JPS48103888A/ja
Publication of JPS5027114B2 publication Critical patent/JPS5027114B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coloring (AREA)
JP47035426A 1972-04-07 1972-04-07 Expired JPS5027114B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47035426A JPS5027114B2 (enrdf_load_stackoverflow) 1972-04-07 1972-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47035426A JPS5027114B2 (enrdf_load_stackoverflow) 1972-04-07 1972-04-07

Publications (2)

Publication Number Publication Date
JPS48103888A JPS48103888A (enrdf_load_stackoverflow) 1973-12-26
JPS5027114B2 true JPS5027114B2 (enrdf_load_stackoverflow) 1975-09-05

Family

ID=12441526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47035426A Expired JPS5027114B2 (enrdf_load_stackoverflow) 1972-04-07 1972-04-07

Country Status (1)

Country Link
JP (1) JPS5027114B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220053479A (ko) * 2020-10-22 2022-04-29 도쿄엘렉트론가부시키가이샤 리프트 핀의 콘택트 위치 조정 방법, 리프트 핀의 콘택트 위치 검지 방법, 및 기판 탑재 기구

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220053479A (ko) * 2020-10-22 2022-04-29 도쿄엘렉트론가부시키가이샤 리프트 핀의 콘택트 위치 조정 방법, 리프트 핀의 콘택트 위치 검지 방법, 및 기판 탑재 기구

Also Published As

Publication number Publication date
JPS48103888A (enrdf_load_stackoverflow) 1973-12-26

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