JPS5026777A - - Google Patents

Info

Publication number
JPS5026777A
JPS5026777A JP7812273A JP7812273A JPS5026777A JP S5026777 A JPS5026777 A JP S5026777A JP 7812273 A JP7812273 A JP 7812273A JP 7812273 A JP7812273 A JP 7812273A JP S5026777 A JPS5026777 A JP S5026777A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7812273A
Other languages
Japanese (ja)
Other versions
JPS5310953B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7812273A priority Critical patent/JPS5310953B2/ja
Publication of JPS5026777A publication Critical patent/JPS5026777A/ja
Publication of JPS5310953B2 publication Critical patent/JPS5310953B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7812273A 1973-07-10 1973-07-10 Expired JPS5310953B2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7812273A JPS5310953B2 (enExample) 1973-07-10 1973-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7812273A JPS5310953B2 (enExample) 1973-07-10 1973-07-10

Publications (2)

Publication Number Publication Date
JPS5026777A true JPS5026777A (enExample) 1975-03-19
JPS5310953B2 JPS5310953B2 (enExample) 1978-04-18

Family

ID=13653068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7812273A Expired JPS5310953B2 (enExample) 1973-07-10 1973-07-10

Country Status (1)

Country Link
JP (1) JPS5310953B2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4723140U (enExample) * 1971-04-08 1972-11-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4723140U (enExample) * 1971-04-08 1972-11-15

Also Published As

Publication number Publication date
JPS5310953B2 (enExample) 1978-04-18

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