JPS5026777A - - Google Patents

Info

Publication number
JPS5026777A
JPS5026777A JP7812273A JP7812273A JPS5026777A JP S5026777 A JPS5026777 A JP S5026777A JP 7812273 A JP7812273 A JP 7812273A JP 7812273 A JP7812273 A JP 7812273A JP S5026777 A JPS5026777 A JP S5026777A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7812273A
Other languages
Japanese (ja)
Other versions
JPS5310953B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7812273A priority Critical patent/JPS5310953B2/ja
Publication of JPS5026777A publication Critical patent/JPS5026777A/ja
Publication of JPS5310953B2 publication Critical patent/JPS5310953B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7812273A 1973-07-10 1973-07-10 Expired JPS5310953B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7812273A JPS5310953B2 (enrdf_load_stackoverflow) 1973-07-10 1973-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7812273A JPS5310953B2 (enrdf_load_stackoverflow) 1973-07-10 1973-07-10

Publications (2)

Publication Number Publication Date
JPS5026777A true JPS5026777A (enrdf_load_stackoverflow) 1975-03-19
JPS5310953B2 JPS5310953B2 (enrdf_load_stackoverflow) 1978-04-18

Family

ID=13653068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7812273A Expired JPS5310953B2 (enrdf_load_stackoverflow) 1973-07-10 1973-07-10

Country Status (1)

Country Link
JP (1) JPS5310953B2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4723140U (enrdf_load_stackoverflow) * 1971-04-08 1972-11-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4723140U (enrdf_load_stackoverflow) * 1971-04-08 1972-11-15

Also Published As

Publication number Publication date
JPS5310953B2 (enrdf_load_stackoverflow) 1978-04-18

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