JPS5026314B1 - - Google Patents
Info
- Publication number
- JPS5026314B1 JPS5026314B1 JP47018849A JP1884972A JPS5026314B1 JP S5026314 B1 JPS5026314 B1 JP S5026314B1 JP 47018849 A JP47018849 A JP 47018849A JP 1884972 A JP1884972 A JP 1884972A JP S5026314 B1 JPS5026314 B1 JP S5026314B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
Landscapes
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US354386A US3319117A (en) | 1964-03-24 | 1964-03-24 | Ionization vacuum gauge for use in the 10-6 to 1 torr range |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5026314B1 true JPS5026314B1 (ja) | 1975-08-30 |
Family
ID=23393098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47018849A Pending JPS5026314B1 (ja) | 1964-03-24 | 1972-02-23 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3319117A (ja) |
| JP (1) | JPS5026314B1 (ja) |
| DE (1) | DE1698647B1 (ja) |
| GB (2) | GB1106474A (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3387175A (en) * | 1965-03-05 | 1968-06-04 | Varian Associates | Vacuum gauge having separate electron collecting and electron accelerating electrodes |
| US3465189A (en) * | 1966-10-13 | 1969-09-02 | Canadian Patents Dev | Ionization vacuum gauge with x-ray shielding and ion reflecting means |
| US3495127A (en) * | 1968-02-26 | 1970-02-10 | Gen Electric | Ultra-high vacuum magnetron ionization gauge with ion-collector shield |
| US3743876A (en) * | 1969-10-07 | 1973-07-03 | Canadian Patents Dev | Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode |
| GB8603999D0 (en) * | 1986-02-18 | 1986-03-26 | Vg Instr Group | Vacuum monitoring apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE753159C (de) * | 1941-10-19 | 1954-07-19 | Siemens & Halske A G | Ionisationsmanometer |
| DE843313C (de) * | 1951-02-27 | 1952-08-14 | Telefunken Gmbh | Elektrische Entladungseinrichtung mit einer Gluehkathode, einer Ionisierungselektrode und einer Ionenauffangelektrode zum Messen des im Entladungsraum herrschenden Gasdruckes mittels des zur Ionenauffangelektrode uebergehenden Ionenstromes |
| CH355309A (de) * | 1956-12-31 | 1961-06-30 | Leybolds Nachfolger E | Ionisationsmanometer |
| US3267326A (en) * | 1963-09-05 | 1966-08-16 | Varian Associates | Vacuum gauge |
-
1964
- 1964-03-24 US US354386A patent/US3319117A/en not_active Expired - Lifetime
-
1965
- 1965-03-18 DE DE19651698647 patent/DE1698647B1/de active Pending
- 1965-03-23 GB GB12322/65A patent/GB1106474A/en not_active Expired
- 1965-03-23 GB GB7431/67A patent/GB1106475A/en not_active Expired
-
1972
- 1972-02-23 JP JP47018849A patent/JPS5026314B1/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| GB1106475A (en) | 1968-03-20 |
| US3319117A (en) | 1967-05-09 |
| GB1106474A (en) | 1968-03-20 |
| DE1698647B1 (de) | 1970-06-25 |