JPS5025964B2 - - Google Patents

Info

Publication number
JPS5025964B2
JPS5025964B2 JP47068578A JP6857872A JPS5025964B2 JP S5025964 B2 JPS5025964 B2 JP S5025964B2 JP 47068578 A JP47068578 A JP 47068578A JP 6857872 A JP6857872 A JP 6857872A JP S5025964 B2 JPS5025964 B2 JP S5025964B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47068578A
Other languages
Japanese (ja)
Other versions
JPS4927707A (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47068578A priority Critical patent/JPS5025964B2/ja
Publication of JPS4927707A publication Critical patent/JPS4927707A/ja
Publication of JPS5025964B2 publication Critical patent/JPS5025964B2/ja
Expired legal-status Critical Current

Links

JP47068578A 1972-07-08 1972-07-08 Expired JPS5025964B2 (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47068578A JPS5025964B2 (zh) 1972-07-08 1972-07-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47068578A JPS5025964B2 (zh) 1972-07-08 1972-07-08

Publications (2)

Publication Number Publication Date
JPS4927707A JPS4927707A (zh) 1974-03-12
JPS5025964B2 true JPS5025964B2 (zh) 1975-08-28

Family

ID=13377782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47068578A Expired JPS5025964B2 (zh) 1972-07-08 1972-07-08

Country Status (1)

Country Link
JP (1) JPS5025964B2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217426B2 (zh) * 1983-01-24 1990-04-20 Nippon Light Metal Co

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5478463B2 (ja) 2010-11-17 2014-04-23 信越化学工業株式会社 リソグラフィー用ペリクル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917912U (zh) * 1972-05-24 1974-02-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0217426B2 (zh) * 1983-01-24 1990-04-20 Nippon Light Metal Co

Also Published As

Publication number Publication date
JPS4927707A (zh) 1974-03-12

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