JPS5025964B2 - - Google Patents
Info
- Publication number
- JPS5025964B2 JPS5025964B2 JP47068578A JP6857872A JPS5025964B2 JP S5025964 B2 JPS5025964 B2 JP S5025964B2 JP 47068578 A JP47068578 A JP 47068578A JP 6857872 A JP6857872 A JP 6857872A JP S5025964 B2 JPS5025964 B2 JP S5025964B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47068578A JPS5025964B2 (enExample) | 1972-07-08 | 1972-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47068578A JPS5025964B2 (enExample) | 1972-07-08 | 1972-07-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4927707A JPS4927707A (enExample) | 1974-03-12 |
| JPS5025964B2 true JPS5025964B2 (enExample) | 1975-08-28 |
Family
ID=13377782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47068578A Expired JPS5025964B2 (enExample) | 1972-07-08 | 1972-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5025964B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5478463B2 (ja) | 2010-11-17 | 2014-04-23 | 信越化学工業株式会社 | リソグラフィー用ペリクル |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4917912U (enExample) * | 1972-05-24 | 1974-02-15 |
-
1972
- 1972-07-08 JP JP47068578A patent/JPS5025964B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4927707A (enExample) | 1974-03-12 |