JPS5025178A - - Google Patents
Info
- Publication number
- JPS5025178A JPS5025178A JP48060847A JP6084773A JPS5025178A JP S5025178 A JPS5025178 A JP S5025178A JP 48060847 A JP48060847 A JP 48060847A JP 6084773 A JP6084773 A JP 6084773A JP S5025178 A JPS5025178 A JP S5025178A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Control Of Exposure In Printing And Copying (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6084773A JPS5336760B2 (ja) | 1973-06-01 | 1973-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6084773A JPS5336760B2 (ja) | 1973-06-01 | 1973-06-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5025178A true JPS5025178A (ja) | 1975-03-17 |
| JPS5336760B2 JPS5336760B2 (ja) | 1978-10-04 |
Family
ID=13154159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6084773A Expired JPS5336760B2 (ja) | 1973-06-01 | 1973-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5336760B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5260955U (ja) * | 1975-10-31 | 1977-05-04 |
-
1973
- 1973-06-01 JP JP6084773A patent/JPS5336760B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5260955U (ja) * | 1975-10-31 | 1977-05-04 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5336760B2 (ja) | 1978-10-04 |