JPS5023984A - - Google Patents
Info
- Publication number
- JPS5023984A JPS5023984A JP48071365A JP7136573A JPS5023984A JP S5023984 A JPS5023984 A JP S5023984A JP 48071365 A JP48071365 A JP 48071365A JP 7136573 A JP7136573 A JP 7136573A JP S5023984 A JPS5023984 A JP S5023984A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48071365A JPS5236826B2 (ja) | 1973-06-26 | 1973-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48071365A JPS5236826B2 (ja) | 1973-06-26 | 1973-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023984A true JPS5023984A (ja) | 1975-03-14 |
| JPS5236826B2 JPS5236826B2 (ja) | 1977-09-19 |
Family
ID=13458388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48071365A Expired JPS5236826B2 (ja) | 1973-06-26 | 1973-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5236826B2 (ja) |
-
1973
- 1973-06-26 JP JP48071365A patent/JPS5236826B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5236826B2 (ja) | 1977-09-19 |