JPS5023969A - - Google Patents
Info
- Publication number
- JPS5023969A JPS5023969A JP7470373A JP7470373A JPS5023969A JP S5023969 A JPS5023969 A JP S5023969A JP 7470373 A JP7470373 A JP 7470373A JP 7470373 A JP7470373 A JP 7470373A JP S5023969 A JPS5023969 A JP S5023969A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7470373A JPS5023969A (ja) | 1973-07-04 | 1973-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7470373A JPS5023969A (ja) | 1973-07-04 | 1973-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5023969A true JPS5023969A (ja) | 1975-03-14 |
Family
ID=13554838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7470373A Pending JPS5023969A (ja) | 1973-07-04 | 1973-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5023969A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147282A (ja) * | 1974-05-15 | 1975-11-26 | ||
| JPS5391570A (en) * | 1974-02-14 | 1978-08-11 | Sanken Electric Co Ltd | Method of diffusing borom |
| JPS55154729A (en) * | 1979-05-22 | 1980-12-02 | Fujikura Ltd | Method of diffusing b into si wafer |
| JP2022544266A (ja) * | 2019-08-15 | 2022-10-17 | アプライド マテリアルズ インコーポレイテッド | エッチング限界寸法制御のための非共形性の高選択性膜 |
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1973
- 1973-07-04 JP JP7470373A patent/JPS5023969A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5391570A (en) * | 1974-02-14 | 1978-08-11 | Sanken Electric Co Ltd | Method of diffusing borom |
| JPS50147282A (ja) * | 1974-05-15 | 1975-11-26 | ||
| JPS55154729A (en) * | 1979-05-22 | 1980-12-02 | Fujikura Ltd | Method of diffusing b into si wafer |
| JP2022544266A (ja) * | 2019-08-15 | 2022-10-17 | アプライド マテリアルズ インコーポレイテッド | エッチング限界寸法制御のための非共形性の高選択性膜 |