JPS5023787A - - Google Patents
Info
- Publication number
- JPS5023787A JPS5023787A JP7416873A JP7416873A JPS5023787A JP S5023787 A JPS5023787 A JP S5023787A JP 7416873 A JP7416873 A JP 7416873A JP 7416873 A JP7416873 A JP 7416873A JP S5023787 A JPS5023787 A JP S5023787A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7416873A JPS5615140B2 (fr) | 1973-06-30 | 1973-06-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7416873A JPS5615140B2 (fr) | 1973-06-30 | 1973-06-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5023787A true JPS5023787A (fr) | 1975-03-14 |
JPS5615140B2 JPS5615140B2 (fr) | 1981-04-08 |
Family
ID=13539343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7416873A Expired JPS5615140B2 (fr) | 1973-06-30 | 1973-06-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5615140B2 (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52111381A (en) * | 1976-03-15 | 1977-09-19 | Nippon Telegr & Teleph Corp <Ntt> | Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method |
JPH01246875A (ja) * | 1988-03-29 | 1989-10-02 | Toshiba Corp | 半導体装置の製造方法 |
-
1973
- 1973-06-30 JP JP7416873A patent/JPS5615140B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52111381A (en) * | 1976-03-15 | 1977-09-19 | Nippon Telegr & Teleph Corp <Ntt> | Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method |
JPH01246875A (ja) * | 1988-03-29 | 1989-10-02 | Toshiba Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5615140B2 (fr) | 1981-04-08 |