JPS5023787A - - Google Patents

Info

Publication number
JPS5023787A
JPS5023787A JP7416873A JP7416873A JPS5023787A JP S5023787 A JPS5023787 A JP S5023787A JP 7416873 A JP7416873 A JP 7416873A JP 7416873 A JP7416873 A JP 7416873A JP S5023787 A JPS5023787 A JP S5023787A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7416873A
Other languages
Japanese (ja)
Other versions
JPS5615140B2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7416873A priority Critical patent/JPS5615140B2/ja
Publication of JPS5023787A publication Critical patent/JPS5023787A/ja
Publication of JPS5615140B2 publication Critical patent/JPS5615140B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP7416873A 1973-06-30 1973-06-30 Expired JPS5615140B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7416873A JPS5615140B2 (fr) 1973-06-30 1973-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7416873A JPS5615140B2 (fr) 1973-06-30 1973-06-30

Publications (2)

Publication Number Publication Date
JPS5023787A true JPS5023787A (fr) 1975-03-14
JPS5615140B2 JPS5615140B2 (fr) 1981-04-08

Family

ID=13539343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7416873A Expired JPS5615140B2 (fr) 1973-06-30 1973-06-30

Country Status (1)

Country Link
JP (1) JPS5615140B2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52111381A (en) * 1976-03-15 1977-09-19 Nippon Telegr & Teleph Corp <Ntt> Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method
JPH01246875A (ja) * 1988-03-29 1989-10-02 Toshiba Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52111381A (en) * 1976-03-15 1977-09-19 Nippon Telegr & Teleph Corp <Ntt> Photo-sensitive material for forming pattern having photo-sensitive ca lcogenide layer and the pattern forming method
JPH01246875A (ja) * 1988-03-29 1989-10-02 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5615140B2 (fr) 1981-04-08

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