JPS5023780A - - Google Patents
Info
- Publication number
- JPS5023780A JPS5023780A JP7380073A JP7380073A JPS5023780A JP S5023780 A JPS5023780 A JP S5023780A JP 7380073 A JP7380073 A JP 7380073A JP 7380073 A JP7380073 A JP 7380073A JP S5023780 A JPS5023780 A JP S5023780A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7380073A JPS5738025B2 (ja) | 1973-06-30 | 1973-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7380073A JPS5738025B2 (ja) | 1973-06-30 | 1973-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023780A true JPS5023780A (ja) | 1975-03-14 |
| JPS5738025B2 JPS5738025B2 (ja) | 1982-08-13 |
Family
ID=13528602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7380073A Expired JPS5738025B2 (ja) | 1973-06-30 | 1973-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5738025B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5868932A (ja) * | 1981-10-20 | 1983-04-25 | Matsushita Electronics Corp | パタ−ン形成方法 |
-
1973
- 1973-06-30 JP JP7380073A patent/JPS5738025B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5868932A (ja) * | 1981-10-20 | 1983-04-25 | Matsushita Electronics Corp | パタ−ン形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5738025B2 (ja) | 1982-08-13 |