JPS5023779A - - Google Patents

Info

Publication number
JPS5023779A
JPS5023779A JP48073708A JP7370873A JPS5023779A JP S5023779 A JPS5023779 A JP S5023779A JP 48073708 A JP48073708 A JP 48073708A JP 7370873 A JP7370873 A JP 7370873A JP S5023779 A JPS5023779 A JP S5023779A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48073708A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48073708A priority Critical patent/JPS5023779A/ja
Publication of JPS5023779A publication Critical patent/JPS5023779A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP48073708A 1973-07-02 1973-07-02 Pending JPS5023779A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48073708A JPS5023779A (ja) 1973-07-02 1973-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48073708A JPS5023779A (ja) 1973-07-02 1973-07-02

Publications (1)

Publication Number Publication Date
JPS5023779A true JPS5023779A (ja) 1975-03-14

Family

ID=13525971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48073708A Pending JPS5023779A (ja) 1973-07-02 1973-07-02

Country Status (1)

Country Link
JP (1) JPS5023779A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139374A (en) * 1976-05-17 1977-11-21 Hitachi Ltd Alignment pattern forming method for mask alignment
JPS5360165A (en) * 1976-11-10 1978-05-30 Nippon Telegr & Teleph Corp <Ntt> Diffusion method
JPS5629325A (en) * 1979-08-17 1981-03-24 Hitachi Ltd Manufacture of semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139374A (en) * 1976-05-17 1977-11-21 Hitachi Ltd Alignment pattern forming method for mask alignment
JPS5360165A (en) * 1976-11-10 1978-05-30 Nippon Telegr & Teleph Corp <Ntt> Diffusion method
JPS5629325A (en) * 1979-08-17 1981-03-24 Hitachi Ltd Manufacture of semiconductor device

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