JPS5023569A - - Google Patents
Info
- Publication number
- JPS5023569A JPS5023569A JP7276873A JP7276873A JPS5023569A JP S5023569 A JPS5023569 A JP S5023569A JP 7276873 A JP7276873 A JP 7276873A JP 7276873 A JP7276873 A JP 7276873A JP S5023569 A JPS5023569 A JP S5023569A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276873A JPS5340319B2 (ja) | 1973-06-29 | 1973-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7276873A JPS5340319B2 (ja) | 1973-06-29 | 1973-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023569A true JPS5023569A (ja) | 1975-03-13 |
| JPS5340319B2 JPS5340319B2 (ja) | 1978-10-26 |
Family
ID=13498872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7276873A Expired JPS5340319B2 (ja) | 1973-06-29 | 1973-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5340319B2 (ja) |
-
1973
- 1973-06-29 JP JP7276873A patent/JPS5340319B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5340319B2 (ja) | 1978-10-26 |