JPS5023276B1 - - Google Patents

Info

Publication number
JPS5023276B1
JPS5023276B1 JP44099699A JP9969969A JPS5023276B1 JP S5023276 B1 JPS5023276 B1 JP S5023276B1 JP 44099699 A JP44099699 A JP 44099699A JP 9969969 A JP9969969 A JP 9969969A JP S5023276 B1 JPS5023276 B1 JP S5023276B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP44099699A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP44099699A priority Critical patent/JPS5023276B1/ja
Priority to DE19702009284 priority patent/DE2009284C3/de
Priority to NL7002828A priority patent/NL7002828A/xx
Priority to GB957070A priority patent/GB1305792A/en
Priority to US05/384,022 priority patent/US3984186A/en
Publication of JPS5023276B1 publication Critical patent/JPS5023276B1/ja
Pending legal-status Critical Current

Links

Landscapes

  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP44099699A 1969-02-27 1969-12-11 Pending JPS5023276B1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP44099699A JPS5023276B1 (ja) 1969-12-11 1969-12-11
DE19702009284 DE2009284C3 (de) 1969-02-27 1970-02-27 Fotomasken-Projektionseinrichtung
NL7002828A NL7002828A (ja) 1969-02-27 1970-02-27
GB957070A GB1305792A (ja) 1969-02-27 1970-02-27
US05/384,022 US3984186A (en) 1969-02-27 1973-07-30 Projection masking system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP44099699A JPS5023276B1 (ja) 1969-12-11 1969-12-11

Publications (1)

Publication Number Publication Date
JPS5023276B1 true JPS5023276B1 (ja) 1975-08-06

Family

ID=14254282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP44099699A Pending JPS5023276B1 (ja) 1969-02-27 1969-12-11

Country Status (1)

Country Link
JP (1) JPS5023276B1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51126287U (ja) * 1975-04-05 1976-10-13
JPS5486582U (ja) * 1977-12-01 1979-06-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51126287U (ja) * 1975-04-05 1976-10-13
JPS5486582U (ja) * 1977-12-01 1979-06-19

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