JPS5023176A - - Google Patents

Info

Publication number
JPS5023176A
JPS5023176A JP7303673A JP7303673A JPS5023176A JP S5023176 A JPS5023176 A JP S5023176A JP 7303673 A JP7303673 A JP 7303673A JP 7303673 A JP7303673 A JP 7303673A JP S5023176 A JPS5023176 A JP S5023176A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7303673A
Other versions
JPS547439B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7303673A priority Critical patent/JPS547439B2/ja
Publication of JPS5023176A publication Critical patent/JPS5023176A/ja
Publication of JPS547439B2 publication Critical patent/JPS547439B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP7303673A 1973-06-28 1973-06-28 Expired JPS547439B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7303673A JPS547439B2 (ja) 1973-06-28 1973-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7303673A JPS547439B2 (ja) 1973-06-28 1973-06-28

Publications (2)

Publication Number Publication Date
JPS5023176A true JPS5023176A (ja) 1975-03-12
JPS547439B2 JPS547439B2 (ja) 1979-04-06

Family

ID=13506712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7303673A Expired JPS547439B2 (ja) 1973-06-28 1973-06-28

Country Status (1)

Country Link
JP (1) JPS547439B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02128418A (ja) * 1988-11-08 1990-05-16 Fujitsu Ltd 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484311A (en) * 1966-06-21 1969-12-16 Union Carbide Corp Silicon deposition process
JPS4839169A (ja) * 1971-09-22 1973-06-08

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3484311A (en) * 1966-06-21 1969-12-16 Union Carbide Corp Silicon deposition process
JPS4839169A (ja) * 1971-09-22 1973-06-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02128418A (ja) * 1988-11-08 1990-05-16 Fujitsu Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS547439B2 (ja) 1979-04-06

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