JPS5023176A - - Google Patents
Info
- Publication number
- JPS5023176A JPS5023176A JP7303673A JP7303673A JPS5023176A JP S5023176 A JPS5023176 A JP S5023176A JP 7303673 A JP7303673 A JP 7303673A JP 7303673 A JP7303673 A JP 7303673A JP S5023176 A JPS5023176 A JP S5023176A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7303673A JPS547439B2 (ja) | 1973-06-28 | 1973-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7303673A JPS547439B2 (ja) | 1973-06-28 | 1973-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023176A true JPS5023176A (ja) | 1975-03-12 |
| JPS547439B2 JPS547439B2 (ja) | 1979-04-06 |
Family
ID=13506712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7303673A Expired JPS547439B2 (ja) | 1973-06-28 | 1973-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS547439B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02128418A (ja) * | 1988-11-08 | 1990-05-16 | Fujitsu Ltd | 半導体装置の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3484311A (en) * | 1966-06-21 | 1969-12-16 | Union Carbide Corp | Silicon deposition process |
| JPS4839169A (ja) * | 1971-09-22 | 1973-06-08 |
-
1973
- 1973-06-28 JP JP7303673A patent/JPS547439B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3484311A (en) * | 1966-06-21 | 1969-12-16 | Union Carbide Corp | Silicon deposition process |
| JPS4839169A (ja) * | 1971-09-22 | 1973-06-08 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02128418A (ja) * | 1988-11-08 | 1990-05-16 | Fujitsu Ltd | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS547439B2 (ja) | 1979-04-06 |