JPS5023146B1 - - Google Patents
Info
- Publication number
- JPS5023146B1 JPS5023146B1 JP53670A JP53670A JPS5023146B1 JP S5023146 B1 JPS5023146 B1 JP S5023146B1 JP 53670 A JP53670 A JP 53670A JP 53670 A JP53670 A JP 53670A JP S5023146 B1 JPS5023146 B1 JP S5023146B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Winding Filamentary Materials (AREA)
- Winding, Rewinding, Material Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53670A JPS5023146B1 (zh) | 1969-12-31 | 1969-12-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP53670A JPS5023146B1 (zh) | 1969-12-31 | 1969-12-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5023146B1 true JPS5023146B1 (zh) | 1975-08-05 |
Family
ID=11476465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP53670A Pending JPS5023146B1 (zh) | 1969-12-31 | 1969-12-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5023146B1 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150117602A (ko) | 2014-04-10 | 2015-10-20 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 처리 장치 |
-
1969
- 1969-12-31 JP JP53670A patent/JPS5023146B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20150117602A (ko) | 2014-04-10 | 2015-10-20 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 처리 장치 |