JPS5022797A - - Google Patents
Info
- Publication number
- JPS5022797A JPS5022797A JP7331873A JP7331873A JPS5022797A JP S5022797 A JPS5022797 A JP S5022797A JP 7331873 A JP7331873 A JP 7331873A JP 7331873 A JP7331873 A JP 7331873A JP S5022797 A JPS5022797 A JP S5022797A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7331873A JPS5022797A (ja) | 1973-06-30 | 1973-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7331873A JPS5022797A (ja) | 1973-06-30 | 1973-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5022797A true JPS5022797A (ja) | 1975-03-11 |
Family
ID=13514690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7331873A Pending JPS5022797A (ja) | 1973-06-30 | 1973-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5022797A (ja) |
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1973
- 1973-06-30 JP JP7331873A patent/JPS5022797A/ja active Pending