JPS5021715A - - Google Patents
Info
- Publication number
- JPS5021715A JPS5021715A JP7129173A JP7129173A JPS5021715A JP S5021715 A JPS5021715 A JP S5021715A JP 7129173 A JP7129173 A JP 7129173A JP 7129173 A JP7129173 A JP 7129173A JP S5021715 A JPS5021715 A JP S5021715A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7129173A JPS5021715A (ja) | 1973-06-26 | 1973-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7129173A JPS5021715A (ja) | 1973-06-26 | 1973-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5021715A true JPS5021715A (ja) | 1975-03-07 |
Family
ID=13456426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7129173A Pending JPS5021715A (ja) | 1973-06-26 | 1973-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5021715A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6352781A (ja) * | 1986-08-20 | 1988-03-05 | Mitsubishi Heavy Ind Ltd | 不導体材料の電子ビ−ム加工方法 |
-
1973
- 1973-06-26 JP JP7129173A patent/JPS5021715A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6352781A (ja) * | 1986-08-20 | 1988-03-05 | Mitsubishi Heavy Ind Ltd | 不導体材料の電子ビ−ム加工方法 |