JPS5021713B1 - - Google Patents
Info
- Publication number
- JPS5021713B1 JPS5021713B1 JP255966A JP255966A JPS5021713B1 JP S5021713 B1 JPS5021713 B1 JP S5021713B1 JP 255966 A JP255966 A JP 255966A JP 255966 A JP255966 A JP 255966A JP S5021713 B1 JPS5021713 B1 JP S5021713B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP255966A JPS5021713B1 (ja) | 1966-01-19 | 1966-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP255966A JPS5021713B1 (ja) | 1966-01-19 | 1966-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5021713B1 true JPS5021713B1 (ja) | 1975-07-24 |
Family
ID=11532716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP255966A Pending JPS5021713B1 (ja) | 1966-01-19 | 1966-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5021713B1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023136869A (ja) * | 2022-03-17 | 2023-09-29 | 日東電工株式会社 | スパッタリング装置 |
-
1966
- 1966-01-19 JP JP255966A patent/JPS5021713B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023136869A (ja) * | 2022-03-17 | 2023-09-29 | 日東電工株式会社 | スパッタリング装置 |