JPS5021573A - - Google Patents

Info

Publication number
JPS5021573A
JPS5021573A JP7283173A JP7283173A JPS5021573A JP S5021573 A JPS5021573 A JP S5021573A JP 7283173 A JP7283173 A JP 7283173A JP 7283173 A JP7283173 A JP 7283173A JP S5021573 A JPS5021573 A JP S5021573A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7283173A
Other versions
JPS5142415B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7283173A priority Critical patent/JPS5142415B2/ja
Publication of JPS5021573A publication Critical patent/JPS5021573A/ja
Publication of JPS5142415B2 publication Critical patent/JPS5142415B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vehicle Cleaning, Maintenance, Repair, Refitting, And Outriggers (AREA)
  • Pusher Or Impeller Conveyors (AREA)
JP7283173A 1973-06-29 1973-06-29 Expired JPS5142415B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7283173A JPS5142415B2 (ja) 1973-06-29 1973-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7283173A JPS5142415B2 (ja) 1973-06-29 1973-06-29

Publications (2)

Publication Number Publication Date
JPS5021573A true JPS5021573A (ja) 1975-03-07
JPS5142415B2 JPS5142415B2 (ja) 1976-11-16

Family

ID=13500741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7283173A Expired JPS5142415B2 (ja) 1973-06-29 1973-06-29

Country Status (1)

Country Link
JP (1) JPS5142415B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4417947A (en) * 1982-07-16 1983-11-29 Signetics Corporation Edge profile control during patterning of silicon by dry etching with CCl4 -O2 mixtures

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4417947A (en) * 1982-07-16 1983-11-29 Signetics Corporation Edge profile control during patterning of silicon by dry etching with CCl4 -O2 mixtures

Also Published As

Publication number Publication date
JPS5142415B2 (ja) 1976-11-16

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