JPS5021339A - - Google Patents

Info

Publication number
JPS5021339A
JPS5021339A JP7193273A JP7193273A JPS5021339A JP S5021339 A JPS5021339 A JP S5021339A JP 7193273 A JP7193273 A JP 7193273A JP 7193273 A JP7193273 A JP 7193273A JP S5021339 A JPS5021339 A JP S5021339A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7193273A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7193273A priority Critical patent/JPS5021339A/ja
Publication of JPS5021339A publication Critical patent/JPS5021339A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pressure-Spray And Ultrasonic-Wave- Spray Burners (AREA)
JP7193273A 1973-06-26 1973-06-26 Pending JPS5021339A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7193273A JPS5021339A (enrdf_load_stackoverflow) 1973-06-26 1973-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7193273A JPS5021339A (enrdf_load_stackoverflow) 1973-06-26 1973-06-26

Publications (1)

Publication Number Publication Date
JPS5021339A true JPS5021339A (enrdf_load_stackoverflow) 1975-03-06

Family

ID=13474773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7193273A Pending JPS5021339A (enrdf_load_stackoverflow) 1973-06-26 1973-06-26

Country Status (1)

Country Link
JP (1) JPS5021339A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127757A (en) * 1976-04-19 1977-10-26 Nec Corp Production of semiconductor unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52127757A (en) * 1976-04-19 1977-10-26 Nec Corp Production of semiconductor unit

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