JPS5021069A - - Google Patents
Info
- Publication number
- JPS5021069A JPS5021069A JP7077773A JP7077773A JPS5021069A JP S5021069 A JPS5021069 A JP S5021069A JP 7077773 A JP7077773 A JP 7077773A JP 7077773 A JP7077773 A JP 7077773A JP S5021069 A JPS5021069 A JP S5021069A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7077773A JPS5021069A (ja) | 1973-06-25 | 1973-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7077773A JPS5021069A (ja) | 1973-06-25 | 1973-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5021069A true JPS5021069A (ja) | 1975-03-06 |
Family
ID=13441277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7077773A Pending JPS5021069A (ja) | 1973-06-25 | 1973-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5021069A (ja) |
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1973
- 1973-06-25 JP JP7077773A patent/JPS5021069A/ja active Pending