JPS5020981A - - Google Patents

Info

Publication number
JPS5020981A
JPS5020981A JP7267173A JP7267173A JPS5020981A JP S5020981 A JPS5020981 A JP S5020981A JP 7267173 A JP7267173 A JP 7267173A JP 7267173 A JP7267173 A JP 7267173A JP S5020981 A JPS5020981 A JP S5020981A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7267173A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7267173A priority Critical patent/JPS5020981A/ja
Publication of JPS5020981A publication Critical patent/JPS5020981A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP7267173A 1973-06-26 1973-06-26 Pending JPS5020981A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7267173A JPS5020981A (ko) 1973-06-26 1973-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7267173A JPS5020981A (ko) 1973-06-26 1973-06-26

Publications (1)

Publication Number Publication Date
JPS5020981A true JPS5020981A (ko) 1975-03-05

Family

ID=13496040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7267173A Pending JPS5020981A (ko) 1973-06-26 1973-06-26

Country Status (1)

Country Link
JP (1) JPS5020981A (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58109101A (ja) * 1981-12-22 1983-06-29 Ebara Corp 蒸発装置の負荷制御方法及びその装置
JPS58159801A (ja) * 1982-03-19 1983-09-22 Ebara Corp 間接加圧式蒸発装置の制御方法
JPS59109283A (ja) * 1982-12-13 1984-06-23 Hitachi Ltd 溶液の蒸発固化方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58109101A (ja) * 1981-12-22 1983-06-29 Ebara Corp 蒸発装置の負荷制御方法及びその装置
JPH0138521B2 (ko) * 1981-12-22 1989-08-15 Ebara Mfg
JPS58159801A (ja) * 1982-03-19 1983-09-22 Ebara Corp 間接加圧式蒸発装置の制御方法
JPH029841B2 (ko) * 1982-03-19 1990-03-05 Ebara Seisakusho Kk
JPS59109283A (ja) * 1982-12-13 1984-06-23 Hitachi Ltd 溶液の蒸発固化方法
JPS6345269B2 (ko) * 1982-12-13 1988-09-08 Hitachi Ltd

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