JPS5020726A - - Google Patents
Info
- Publication number
- JPS5020726A JPS5020726A JP6974573A JP6974573A JPS5020726A JP S5020726 A JPS5020726 A JP S5020726A JP 6974573 A JP6974573 A JP 6974573A JP 6974573 A JP6974573 A JP 6974573A JP S5020726 A JPS5020726 A JP S5020726A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6974573A JPS5020726A (ja) | 1973-06-22 | 1973-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6974573A JPS5020726A (ja) | 1973-06-22 | 1973-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5020726A true JPS5020726A (ja) | 1975-03-05 |
Family
ID=13411633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6974573A Pending JPS5020726A (ja) | 1973-06-22 | 1973-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5020726A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01307758A (ja) * | 1988-06-07 | 1989-12-12 | Toshiba Corp | 露光装置 |
-
1973
- 1973-06-22 JP JP6974573A patent/JPS5020726A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01307758A (ja) * | 1988-06-07 | 1989-12-12 | Toshiba Corp | 露光装置 |