JPS5020315A - - Google Patents
Info
- Publication number
- JPS5020315A JPS5020315A JP7151473A JP7151473A JPS5020315A JP S5020315 A JPS5020315 A JP S5020315A JP 7151473 A JP7151473 A JP 7151473A JP 7151473 A JP7151473 A JP 7151473A JP S5020315 A JPS5020315 A JP S5020315A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7151473A JPS525369B2 (ja) | 1973-06-25 | 1973-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7151473A JPS525369B2 (ja) | 1973-06-25 | 1973-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5020315A true JPS5020315A (ja) | 1975-03-04 |
| JPS525369B2 JPS525369B2 (ja) | 1977-02-12 |
Family
ID=13462882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7151473A Expired JPS525369B2 (ja) | 1973-06-25 | 1973-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS525369B2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107932306A (zh) * | 2017-12-22 | 2018-04-20 | 朱玉林 | 一种新型的半导体材料研磨设备 |
-
1973
- 1973-06-25 JP JP7151473A patent/JPS525369B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107932306A (zh) * | 2017-12-22 | 2018-04-20 | 朱玉林 | 一种新型的半导体材料研磨设备 |
| CN107932306B (zh) * | 2017-12-22 | 2018-12-18 | 徐州吉兴新材料有限公司 | 一种新型的半导体材料研磨设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS525369B2 (ja) | 1977-02-12 |