JPS5020019Y2 - - Google Patents

Info

Publication number
JPS5020019Y2
JPS5020019Y2 JP11014571U JP11014571U JPS5020019Y2 JP S5020019 Y2 JPS5020019 Y2 JP S5020019Y2 JP 11014571 U JP11014571 U JP 11014571U JP 11014571 U JP11014571 U JP 11014571U JP S5020019 Y2 JPS5020019 Y2 JP S5020019Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11014571U
Other versions
JPS4864439U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11014571U priority Critical patent/JPS5020019Y2/ja
Publication of JPS4864439U publication Critical patent/JPS4864439U/ja
Application granted granted Critical
Publication of JPS5020019Y2 publication Critical patent/JPS5020019Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11014571U 1971-11-26 1971-11-26 Expired JPS5020019Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11014571U JPS5020019Y2 (ja) 1971-11-26 1971-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11014571U JPS5020019Y2 (ja) 1971-11-26 1971-11-26

Publications (2)

Publication Number Publication Date
JPS4864439U JPS4864439U (ja) 1973-08-16
JPS5020019Y2 true JPS5020019Y2 (ja) 1975-06-18

Family

ID=28022608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11014571U Expired JPS5020019Y2 (ja) 1971-11-26 1971-11-26

Country Status (1)

Country Link
JP (1) JPS5020019Y2 (ja)

Also Published As

Publication number Publication date
JPS4864439U (ja) 1973-08-16

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