JPS5019071B1 - - Google Patents
Info
- Publication number
- JPS5019071B1 JPS5019071B1 JP5715670A JP5715670A JPS5019071B1 JP S5019071 B1 JPS5019071 B1 JP S5019071B1 JP 5715670 A JP5715670 A JP 5715670A JP 5715670 A JP5715670 A JP 5715670A JP S5019071 B1 JPS5019071 B1 JP S5019071B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5715670A JPS5019071B1 (ja) | 1970-06-30 | 1970-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5715670A JPS5019071B1 (ja) | 1970-06-30 | 1970-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5019071B1 true JPS5019071B1 (ja) | 1975-07-03 |
Family
ID=13047691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5715670A Pending JPS5019071B1 (ja) | 1970-06-30 | 1970-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5019071B1 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190080769A (ko) | 2017-12-28 | 2019-07-08 | 도오꾜오까고오교 가부시끼가이샤 | 레지스트 조성물, 레지스트 패턴 형성 방법, 및 화합물 |
| KR20200043450A (ko) | 2017-09-28 | 2020-04-27 | 도오꾜오까고오교 가부시끼가이샤 | 레지스트 조성물 및 레지스트 패턴 형성 방법 |
-
1970
- 1970-06-30 JP JP5715670A patent/JPS5019071B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20200043450A (ko) | 2017-09-28 | 2020-04-27 | 도오꾜오까고오교 가부시끼가이샤 | 레지스트 조성물 및 레지스트 패턴 형성 방법 |
| KR20190080769A (ko) | 2017-12-28 | 2019-07-08 | 도오꾜오까고오교 가부시끼가이샤 | 레지스트 조성물, 레지스트 패턴 형성 방법, 및 화합물 |